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What is Titanium Silicide?

Views : 255
Author : Trunnano
Update time : 2022-03-15 11:11:52
What is Titanium Silicide?
Titanium silicide is known as titanium disilicide, its chemical formula TiSi2 powder, which is a chemical substance with a molecular weight of 116.1333.
The characteristics of Titanium Silicide
Titanium silicide TiSi2 powder (CAS 12039-83-7) has a high melting point, high corrosion resistance, high oxidation resistance, good electrical conductivity, high temperature ductility, a binary alloy systemthe intermediate phase.
Titanium Silicide Properties
Other Names TiSi2 powder, titanium disilicide
CAS No. 12039-83-7
Compound Formula TiSi2
Molecular Weight 104.04
Appearance Black Powder
Melting Point 1470 °C
Boiling Point N/A
Density 4.02 g/cm3
Solubility in H2O N/A
Exact Mass 103.9018
The applications of Titanium Silicide
1. Prepare a titanium silicide barrier layer, the device using the method for producing the titanium silicide barrier layer includes a non-silicide region and a silicide region separated by an isolation region, and the upper surface of the device is covered with a layer of sacrificial oxide layer, the present invention includes : The photolithography process is used to make the photoresist cover the non-silicide area and the silicide area is exposed; the wet etching process is used to etch the sacrificial oxide layer of the silicide area; the silicon exposed in the silicide area is amorphized , As implantation; removing the photoresist remaining in the non-silicide area; sputtering metal titanium for the first alloying treatment; wet etching to remove the unalloyed metal titanium for the second alloying treatment. The invention deletes the silicideblock oxide layer in the prior art, reduces the process cost, reduces the loss of the isolation oxide film by etching, and improves the process stability.
2. An in-situ synthesis of titanium silicide (Ti5Si3) particles reinforced aluminum titanium carbide (Ti3AlC2) matrix composite material was prepared. By adding a certain amount of silicon, Ti3AlC2/Ti5Si3 composite materials with different volume ratios are prepared, wherein the volume percentage of the titanium silicide particle reinforcing phase is 10-40%. The specific preparation method is as follows: first, using titanium powder, aluminum powder, silicon powder and graphite powder as raw materials, the molar ratio of Ti:Al:Si:C is 3:(1.1-x):x:(1.8~2.0), wherein x is 0.1~0.5. The raw powder is mixed by physical and mechanical methods for 8~24 hours, put into a graphite mold, the applied pressure is 10~20MPa, and sintered in a hot pressing furnace with a protective atmosphere, the heating rate is 10~50℃/min, and the sintering temperature The temperature is 1400~1600℃, the sintering time is 0.5~2 hours, and the sintering pressure is 20~40MPa. The invention can prepare the aluminum titanium carbide/titanium silicide composite material with high purity and high strength at lower temperature and shorter time.
3. Preparation of composite functional titanium silicide coated glass. A thin film is deposited on a common float glass substrate or a silicon thin film is deposited between them. By preparing a composite film of titanium silicide and silicon or adding a small amount of active carbon or nitrogen into the film to obtain a composite film of titanium silicide composite silicon carbide or titanium carbide or titanium silicide composite silicon nitride or titanium nitride, the The mechanical strength and chemical resistance of the coated glass are improved. The invention is a new type of coated glass which combines the functions of dimming heat insulation and low radiation glass.
The main supplier of Titanium Silicide
Luoyang Trunnano Tech Co., Ltd (TRUNNANO) is a professional silicide powder supplier with over 12 years of experience in chemical products research and development. We accept payment via Credit Card, T/T, West Union, and Paypal. Trunnano will ship the goods to customers overseas through FedEx, DHL, by air, or by sea.
If you are looking for high-quality boron carbide powder, please feel free to contact usand send an inquiry.
 
 
 
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