Application Analysis of Silicon Carbide in Ceramic Industry
Views : 70
Update time : 2023-12-08 14:09:11
Application Analysis of Silicon Carbide in Ceramic Industry
Silicon carbide ceramic is an ideal material for manufacturing sealing rings. When paired with graphite material, its friction coefficient is smaller than that of alumina ceramic and cemented carbide, and it has good self-lubricating performance so that it can be used for high PV value. It can improve the service life and working reliability of seals, especially in the working condition of conveying solid acids and alkalis. Silicon carbide ceramics are also widely used in bulletproof armor, such as the protection of vehicles and ships, as well as civil safes and armored vehicles. The ballistic performance of silicon carbide ceramics is better than that of alumina ceramics, which is about 70% ~ 80% of that of boron carbide ceramics. Still, because of its low price, it is especially suitable for situations where the protective armor is not too thick or heavy. Many ceramic materials, such as alumina, silicon carbide, and boron carbide ceramics, are used as nozzles. The price of alumina ceramic nozzles is low, but because of their low hardness and poor wear resistance, they are mainly used when the workload of sandblasting is not significant. The service life of silicon carbide ceramics is 3 ~ 5 times longer than that of alumina ceramics, which is similar to that of cemented carbide and is often used as a substitute for cemented carbide, especially in the working condition of hand-held spray gun.
Hot materials for precision components used in semiconductor equipment such as lithography machines
Ceramics are the critical component materials in semiconductor essential equipment, such as etching machines, glue developer, lithography machines, ion implanters, and so on, and their cost has accounted for more than 10% of the cost of semiconductor equipment. Among them, silicon carbide ceramics are widely used in the process equipment from the front to the backstage of semiconductor manufacturing. For example, it plays a vital role in grinding polishing suckers, lithography suckers, testing suckers, precision motion platforms, high-purity silicon carbide components in etching, precision motion systems in packaging inspection, and so on.
1) In the lithography machine
In the high-end lithography machine, to achieve high process precision, ceramic parts with good functional compounding, structural stability, thermal stability and dimensional accuracy, such as E-chuck, Vacumm-chuck, Block, magnetic steel skeleton water-cooled plate, mirror, guideway and so on, need to be widely used. In this respect, silicon carbide ceramics are competent.
2) In etching equipment
In the etching equipment, the plasma will cause severe corrosion to the surface of the equipment through physical action and chemical reaction, on the one hand, shorten the service life of the components and reduce the performance of the equipment; on the other hand, the reaction products produced in the corrosion process will volatilize and fall off, resulting in impurity particles in the process cavity, affecting the cleanliness of the chamber. Therefore, the plasma etching resistance of the cavity and cavity parts of the etching machine becomes significant. SiC produces less impurity pollution than quartz as an etching machine cavity material. Because of its better mechanical properties, the atomic loss rate of plasma bombardment on its atomic surface is relatively less. Mitsui Company of Japan reported that a kind of SiC composite material has high corrosion resistance as an air etching machine cavity material. Its function of focusing ring components is to provide balanced plasma, which requires a conductivity similar to that of silicon wafers. The materials used in the past are mainly conductive silicon. Still, fluorine-containing plasma reacts with silicon to form volatile silicon fluoride, significantly shortening its service life, resulting in frequent replacement of components and reducing production efficiency. SiC has similar electrical conductivity to single crystal Si and has better resistance to plasma etching so it can be used as a material for focusing rings. As the critical consumables of semiconductor materials in plasma etching, SiC etching rings require high purity. Generally speaking, SiC thick-layer blocks can only be grown by the CVD process and then fabricated by precision machining, mainly used in preparing the semiconductor etching process. Silicon Carbide, Ceramic Kiln Furniture, is the "behind-the-scenes worker" in sintering lithium electric materials.
As a branch of new energy, there is no need to elaborate on how popular lithium electricity is.
A roller kiln is a critical continuous production equipment in the drying, sintering and heat treatment of cathode materials, anode materials and electrolytes for lithium-ion batteries. Kiln furniture, recycled in industrial kilns, is a vital accessory of the kiln. Refractory products used to support or protect burned products are driven by the expansion of cathode materials, and the application scale of kiln furniture is expanded. Silicon carbide ceramic kiln furniture has excellent high-temperature mechanical properties. Applying fire and thermal shock resistance in ceramic kilns can increase kiln production capacity, significantly reduce energy consumption, and become an ideal choice for all kiln and kiln furniture materials. We can see that silicon carbide materials, whether as single crystal materials or ceramic materials, occupy a critical position in the industrial chain of the hottest industries such as semiconductors, lithium electricity, photovoltaic and so on. and where the three major industries are hundreds of billions of market size of the track, and these industries are growing at a high speed, it can be predicted that the future of silicon carbide materials is perfect.
Silicon Carbide Powder Supplier
Luoyang Trunnano Tech Co., Ltd (TRUNNANO) is a professional silicon carbidepowder supplier with over 12 years experience in chemical products research and development. We accept payment via Credit Card, T/T, West Union and Paypal. Trunnano will ship the goods to customers overseas through FedEx, DHL, by air, or by sea.
